このシリーズのマイクロメカニカルレーザ走査ミラーは、1 D製品と2 D製品に分かれています。すなわち、その走査軸が1軸または2軸であることによって異なります。このようなマイクロ光機械電気ビーム走査ミラーは、マイクロ走査ミラーまたはマイクロ光機械電気ビーム偏向器とも呼ばれる。
The mirror plate of the microscanner performs a continuous, harmonic oscillation. The oscillation is excited electrostatically and utilizes planar electrostatic comb drives. The oscillation-frequency has to be close to the natural frequency of the scanning axis. Adjusting the driving voltage or the driving frequency allows setting and controlling the
oscillation amplitude. For 2D devices, the mirror plate is gimbal-mounted. The resonance frequency of each axis is determined by design independently. Each axis is excited individually. Thus, the ratio of the oscillation amplitudes and the phase difference can be set and controlled arbitrarily.

Technical Properties